Scale factor in MEMS gyroscopes: The effect of power supply voltage

This paper discusses the behavior of MEMS gyroscopes during power supply fluctuations, which is a problem that has not been sufficiently analyzed to date. The focus is placed on the scale factor. In the opening section, the authors present the basic output configurations of the MEMS gyroscopes and propose their general models. The following part of the article has a practical character. Here, eight types of the above-defined gyroscopes are examined to demonstrate the influence of the applied supply voltage. Firstly, the measurement procedure is described, and subsequently the results of this experiment are presented. The outcome of the performed research consists in that the scale factor error is smaller than 1% if the power supply voltage fluctuates within the range of ±0.25 V around the nominal value.