A secondary-side phase-shifting ZVS-PWM dual full bridge DC-DC front-end converter for plasma RF power generator

Author

Mishima, Tomokazu ; Ooue, Yasuyuki ; Fukumoto, Yoshiki ; Nakaoka, Mutsuo

Author_Institution

Kure Nat. Coll. of Technol., Kure, Japan

fYear

2009

fDate

15-18 Nov. 2009

Firstpage

1

Lastpage

6

Abstract

This paper presents a feasibility study of a zero voltage switching (ZVS) PWM dual full bridge (DFB) DC-DC converter with secondary-side phase-shifting power control scheme. The soft-switching PWM DC-DC converter newly-developed for a DC pre-voltage regulator in a plasma radiofrequency (RF) power generator can achieve soft commutation at all the power devices under the wide range of load power. By the phase-shifting control scheme that is based on the secondary-side rectifier of the high-frequency (HF) planar transformer, it can attain the effective reduction of idling power in the primary-side inverter stage. In this paper, the essential experimental data obtained from a 100 kHz-2.5 kW prototype is described to validate the soft-switching circuit scheme and discuss the practical effectiveness of the ZVS-PWM DFB DC-DC converter.

Keywords

DC-DC power convertors; PWM power convertors; electric generators; high-frequency transformers; power control; rectifying circuits; switching convertors; voltage regulators; zero voltage switching; DC prevoltage regulator; dual full bridge DC-DC front-end converter; frequency 100 Hz; high-frequency planar transformer; idling power reduction; plasma RF power generator; plasma radiofrequency power generator; power 2.5 kW; power devices; secondary-side phase-shifting ZVS-PWM converter; secondary-side phase-shifting power control scheme; secondary-side rectifier; soft commutation; soft-switching circuit scheme; zero voltage switching converter; Bridge circuits; DC-DC power converters; Plasmas; Power control; Power generation; Pulse width modulation; Pulse width modulation converters; Radio frequency; Switching converters; Zero voltage switching; DC-DC converter; Plasma power generator; Pulse Width Modulation(PWM); Zero Voltage Switching(ZVS); high-frequency transformer-link; power supply; secondary-side phase shifting(SPS);

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Machines and Systems, 2009. ICEMS 2009. International Conference on

Conference_Location

Tokyo

Print_ISBN

978-1-4244-5177-7

Electronic_ISBN

978-4-88686-067-5

Type

conf

DOI

10.1109/ICEMS.2009.5382822

Filename

5382822