DocumentCode
3140108
Title
Prototype instrument for sheet resistance measurement by pulse voltage excitation
Author
Saotome, Hideo ; Kaneko, Hironori
Author_Institution
Grad. Sch. of Eng., Chiba Univ., Chiba, Japan
fYear
2013
fDate
3-5 Dec. 2013
Firstpage
569
Lastpage
572
Abstract
A novel contactless method for measurement of the sheet resistance of a semiconductor wafer, that utilizes pulse voltage excitation, has been proposed by one of the authors. This novel method was applied and a prototype instrument was developed that can measure sheet resistance under 5 mQ/sq, which is the same as the smallest value for the conventional contactless method.
Keywords
electric resistance measurement; prototypes; contactless method; prototype instrument; pulse voltage excitation; semiconductor wafer; sheet resistance measurement; Capacitors; Current measurement; Electrical resistance measurement; Magnetic cores; Resistance; Semiconductor device measurement; Voltage measurement; contactless measuremnt; eddy current; magnetic induction; pulse voltage excitation; sheet resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensing Technology (ICST), 2013 Seventh International Conference on
Conference_Location
Wellington
ISSN
2156-8065
Print_ISBN
978-1-4673-5220-8
Type
conf
DOI
10.1109/ICSensT.2013.6727717
Filename
6727717
Link To Document