DocumentCode :
314085
Title :
Unconventional methods and unconventional materials for microfabrication
Author :
Whitesides, George M.
Author_Institution :
Dept. of Chem., Harvard Univ., Cambridge, MA, USA
Volume :
1
fYear :
1997
fDate :
16-19 Jun 1997
Firstpage :
23
Abstract :
This talk will outline the rapid progress in soft lithography-microcontact printing, micromolding in capillaries, and transfer molding of organic polymers. These new techniques cover only a part of the range of problems in the fabrication, testing and production of microelectronic systems, but they have an immediate, broad application in a number of other areas requiring small systems from homogeneous self-assembled monolayers (SAMs) to transistors, and from molecular self-assembly to the self-assembly of macro-scale objects
Keywords :
lithography; microassembling; micromechanical devices; molecular electronics; monolayers; polymers; MEMS; capillaries; homogeneous self-assembled monolayers; macro-scale object self-assembly; microcontact printing; microelectronic systems; microfabrication; micromolding; molecular self-assembly; organic polymers; soft lithography; transfer molding; transistors; unconventional materials; unconventional methods; Biological materials; Chemistry; Fabrication; Nanostructures; Organic materials; Polymers; Printing; Self-assembly; Soft lithography; Transfer molding;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
Type :
conf
DOI :
10.1109/SENSOR.1997.613571
Filename :
613571
Link To Document :
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