DocumentCode
314107
Title
A new bi-directional gas-flow sensor based on lift force
Author
Svedin, Niklas ; Stemme, Erik ; Stemme, Göran
Author_Institution
Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden
Volume
1
fYear
1997
fDate
16-19 Jun 1997
Firstpage
145
Abstract
A new bi-directional silicon gas-flow sensor based on lift force has been designed and tested. The lift force deflects an airfoil structure and the deflection is detected by four piezoresistive strain gauges. The lift force principle is based on fundamental airfoil theory and has been verified both electrically and optically. A flow sensitivity of 7.4 μV/V/(m/s)2 has been measured in both flow directions
Keywords
flow measurement; flowmeters; piezoresistive devices; sensors; strain gauges; airfoil structure; bi-directional silicon gas-flow sensor; lift force; piezoresistive strain gauges; Automotive components; Bidirectional control; Capacitive sensors; Drag; Equations; Fluid flow measurement; Force measurement; Force sensors; Piezoresistance; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.613603
Filename
613603
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