Title :
A new bi-directional gas-flow sensor based on lift force
Author :
Svedin, Niklas ; Stemme, Erik ; Stemme, Göran
Author_Institution :
Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden
Abstract :
A new bi-directional silicon gas-flow sensor based on lift force has been designed and tested. The lift force deflects an airfoil structure and the deflection is detected by four piezoresistive strain gauges. The lift force principle is based on fundamental airfoil theory and has been verified both electrically and optically. A flow sensitivity of 7.4 μV/V/(m/s)2 has been measured in both flow directions
Keywords :
flow measurement; flowmeters; piezoresistive devices; sensors; strain gauges; airfoil structure; bi-directional silicon gas-flow sensor; lift force; piezoresistive strain gauges; Automotive components; Bidirectional control; Capacitive sensors; Drag; Equations; Fluid flow measurement; Force measurement; Force sensors; Piezoresistance; Sensor systems;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613603
