Chemical performance and high temperature characterization of micromachined chemical reactors

Author

Srinivasan, R. ; Firebaugh, S.L. ; Hsing, I.-M. ; Ryley, J. ; Harold, M.P. ; Jensen, K.F. ; Schmidt, M.A.

Author_Institution

Microsystems Technol. Lab., MIT, Cambridge, MA, USA

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

163

Abstract

Chemical throughput, product distribution, and lifetime studies have been conducted in Si micromachined chemical reactors (microreactors) for catalytic partial oxidation reactions. Experiments using Pt-catalyzed NH₃ oxidation as model reaction show that conversion and selectivity behavior of conventional reactors can be reproduced in the microreactor. Highly flammable gases that explode in conventional reactors have been safely oxidized in the microreactor. Packaging and high-temperature materials degradation have been identified as technical challenges to commercial chemical production using microreactor systems

Keywords

ammonia; catalysis; chemical reactions; chemical technology; high-temperature techniques; micromachining; oxidation; packaging; silicon; NH₃; Pt-catalyzed NH₃ oxidation; Si; Si micromachined chemical reactors; catalytic partial oxidation reactions; chemical performance; chemical production; chemical throughput; conversion; high temperature characterization; high-temperature materials degradation; highly flammable gases; lifetime studies; micromachined chemical reactors; microreactors; model reaction; packaging; product distribution; selectivity behavior; Chemical products; Chemical reactors; Degradation; Flammability; Gases; Inductors; Oxidation; Packaging; Temperature; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613608

Filename

613608