Design and fabrication of micromirror array supported by vertical springs

Author

Shin, Jong-Woo ; Chung, Seok-Whan ; Kim, Yong-Kweon ; Choi, Bum Kyoo

Author_Institution

Sch. of Electr. Eng., Seoul Nat. Univ., South Korea

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

201

Abstract

A 50×50 μm² aluminum micromirror array is fabricated using surface micromachining technology. 50 by 50 micromirrors are arrayed two dimensionally. A micromirror plate is supported by a vertical spring structure which is placed underneath the mirror plate. With this structure, when the mirror plates reflect light, the micromirror array can have a large effective reflecting area. Only one mask and one shadow evaporation process is used in the fabrication of vertical springs. Measurement of the electromechanical characteristics of the fabricated micromirror revealed that the downward threshold voltage was 8 V, the step response time was 20 μs when a 29 V step voltage was applied, and the resonant frequency was 11 kHz

Keywords

aluminium; arrays; frequency response; micromachining; micromechanical devices; mirrors; optical design techniques; optical fabrication; optical testing; step response; 11 kHz; 20 mus; 29 V; 50 mum; 8 V; Al; downward threshold voltage; electromechanical characteristics; large effective reflecting area; mask; micromirror array; resonant frequency; shadow evaporation process; step response time; step voltage; surface micromachining technology; two dimensional arrays; vertical spring structure; vertical spring structure support; Aluminum; Fabrication; Frequency measurement; Micromachining; Micromirrors; Mirrors; Optical arrays; Springs; Threshold voltage; Time measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613618

Filename

613618