Title :
Thermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloys
Author :
Sedky, Sherif ; Fiorini, Paolo ; Caymax, Matty ; Verbist, Agnes ; Baert, Chris
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
This paper reports the first realization of surface micromachined, suspended structures, made of poly crystalline silicon germanium alloys (poly Si0.7Ge0.3). The electrical and mechanical properties of this material are presented. The effect of the deposition conditions on the above properties is also investigated. The complete process for realizing the suspended structure is described and the possibility of reducing the process temperature down to 650°C is demonstrated
Keywords :
Ge-Si alloys; annealing; bolometers; electrical resistivity; infrared detectors; micromachining; semiconductor materials; stress relaxation; thermal conductivity; thermal insulating materials; 650 C; IR bolometers; Si0.7Ge0.3; annealing temperature; deposition conditions; electrical properties; mechanical properties; polycrystalline Si0.7Ge0.3; process temperature; resistivity; stress relaxation; surface micromachined suspended structures; thermal conductivity; thermally insulated structures; Bolometers; Crystalline materials; Crystallization; Germanium alloys; Germanium silicon alloys; Insulation; Mechanical factors; Silicon alloys; Silicon germanium; Temperature;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613627
