An adaptive calibration technique for micromachined pressure sensors

Author

Lloyd, Jennifer A. ; Lee, Hae-Seung ; Parameswaran, Lalitha ; Schmidt, Martin A. ; Sodini, Charles G.

Author_Institution

MIT, Cambridge, MA, USA

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

295

Abstract

An adaptive calibration technique which continuously calibrates the linearity of capacitive microsensors is described. The sensing system utilizes two sense capacitors of different size and two sigma-delta (ΣΔ) analog-to-digital converters (ADCs). A small, linear sensor is used to calibrate the linearity of a larger, higher-resolution sensor. The integrated circuit containing the ADCs is built in a 0.6 μm, double-poly CMOS technology and uses 150 mW from a 5 V supply

Keywords

CMOS integrated circuits; adaptive systems; calibration; microsensors; pressure sensors; sigma-delta modulation; 0.6 mum; 150 mW; 5 V; adaptive calibration; capacitive microsensors; double-poly CMOS technology; linear sensor; linearity; micromachined pressure sensors; polynomial; pressure sensors; sensor calibration; sigma-delta analog-to-digital converters; Analog-digital conversion; CMOS technology; Calibration; Capacitance; Capacitive sensors; Capacitors; Linearity; Mechanical sensors; Sensor phenomena and characterization; Sensor systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613642

Filename

613642