Title :
An adaptive calibration technique for micromachined pressure sensors
Author :
Lloyd, Jennifer A. ; Lee, Hae-Seung ; Parameswaran, Lalitha ; Schmidt, Martin A. ; Sodini, Charles G.
Author_Institution :
MIT, Cambridge, MA, USA
Abstract :
An adaptive calibration technique which continuously calibrates the linearity of capacitive microsensors is described. The sensing system utilizes two sense capacitors of different size and two sigma-delta (ΣΔ) analog-to-digital converters (ADCs). A small, linear sensor is used to calibrate the linearity of a larger, higher-resolution sensor. The integrated circuit containing the ADCs is built in a 0.6 μm, double-poly CMOS technology and uses 150 mW from a 5 V supply
Keywords :
CMOS integrated circuits; adaptive systems; calibration; microsensors; pressure sensors; sigma-delta modulation; 0.6 mum; 150 mW; 5 V; adaptive calibration; capacitive microsensors; double-poly CMOS technology; linear sensor; linearity; micromachined pressure sensors; polynomial; pressure sensors; sensor calibration; sigma-delta analog-to-digital converters; Analog-digital conversion; CMOS technology; Calibration; Capacitance; Capacitive sensors; Capacitors; Linearity; Mechanical sensors; Sensor phenomena and characterization; Sensor systems;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613642
