Surface-micromachined diffraction gratings for scanning spectroscopic applications

Author

Kiang, Meng-Hsiung ; Nee, Jocelyn T. ; Lau, Kam Y. ; Muller, Richard S.

Author_Institution

California Univ., Berkeley, CA, USA

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

343

Abstract

We report the design and fabrication of an actuated diffraction grating using a foundry (Multi-User MEMS ProcesS, or MUMPS, at MCNC) surface-micromachining process. Rectangular gratings with 4 μm period and 0.75 μm depth are produced on a 500×1000 μm polysilicon plate, which is mounted on torsion bars, and actuated by an electrostatic combdrive. Operated as a first-order reflective grating, it can be used to build an integrated scanning microspectrometer with a resolving power of 250, or, as a grating demultiplexer for multichannel wavelength-switching networks

Keywords

diffraction gratings; electrostatic devices; microactuators; micromachining; micromechanical devices; multiplexing equipment; optical communication equipment; optical design techniques; optical fabrication; optical resolving power; silicon; spectrometer accessories; wavelength division multiplexing; 0.75 mum; 1000 mum; 4 mum; 500 mum; MUMPS; Si; actuated diffraction grating; design; electrostatic combdrive; fabrication; first-order reflective grating; foundry surface-micromachining process; grating demultiplexer; integrated scanning microspectrometer; multi-user MEMS process; multichannel wavelength-switching networks; polysilicon plate; rectangular gratings; resolving power; scanning spectroscopic applications; surface-micromachined diffraction gratings; torsion bars; Actuators; Bars; Diffraction gratings; Electrostatics; Etching; Fabrication; Fingers; Optical surface waves; Silicon; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613654

Filename

613654