Three dimensionally structured transducers for chemical and biochemical sensors

Chemical sensors and biosensors based on three-dimensionally structured silicon transducers have been developed. With the inclusion of the third wafer dimension some severe problems related to the combination of IC-fabrication technologies and the technologies for the integration of membranes and biological sensor components have been minimized. Two transducer concepts are presented which both are full mass-production compatible in all fabrication steps. With the inclusion of the third wafer dimension more flexibility is achieved for the integration of sensors in μTAS modules and microsystems. Measurement results of the sensors are presented for environmental and medical applications