Novel amorphous MoW20O20 and MoW8O 11 sensors made photochemically at room temperature for sub-ppm NO2 detection

This paper presents a highly efficient room temperature photochemical process for making amorphous metal oxide sensors to detect sub-ppm NO₂. These metal oxide materials are deposited on interdigitated aluminum electrodes by spin coating. Amorphous MoW₂₀ O₂₀ and MoW₂₀O₂₀ thin film sensors have been made for the first time, and they can detect sub-ppm NO₂ at temperatures around 200°C. The performance of the amorphous thin film sensors is compared to that of a polycrystalline MoW ₂₀O₂₀ sensor. The materials characterization of the thin films, and the electrical characteristics, as well as sensitivity and stability of the sensor devices are reported