Application oriented R&D of MEMS (micro electro mechanical systems) by open collaboration

Application oriented MEMS developments by open collaboration with industry have been pursued in Tohoku University. A slim facility in which 20 mm silicon wafers are processed using home made equipments has been used for MEMS prototyping. The facility is shared by approximately 40 laboratories and more than 100 companies have dispatched full time researchers for collaborative development and technology transfer since approximately 30 years ago. Access to accumulated knowledge is important for efficient development of MEMS. Three examples of commercialization in this collaboration are described below.