Fabrication and Evaluation of the Flexible and Implantable Soft Micro Electrode for Retinal Prosthesis

Author

Kwon, Gu-Han ; Baek, Ju-Yeoul ; Lee, Seung-Ha ; Chang, Moo-Hwan ; Dong-Cho Lee ; Kyung-Sun ; Lee, Dong-Cho

fYear

2006

fDate

9-12 May 2006

Firstpage

188

Lastpage

190

Abstract

This paper presents a polydimethylsiloxane (PDMS)-based flexible and implantable micro electrode for the retinal prosthesis. The patterning of the electrode and the wires was performed through the photolithography and chemical etching process after e-beam deposition Ti and Au, and the thick electrode was fabricated through the electroplating process. We carried out in-vivo test for the evaluation of biocompatibility by implanting electrodes under the ICR mouse skin for 45 days. The electrode was implanted under the retina of rabbit´s eye to investigate the feasibility as a retinal prosthesis

Keywords

bioMEMS; biomedical electrodes; electron beam deposition; electroplating; etching; eye; microelectrodes; photolithography; prosthetics; 45 days; Au; ICR mouse skin; Ti; biocompatibility; chemical etching process; e-beam deposition; electroplating process; flexible implantable soft micro electrode fabrication; in-vivo test; patterning; photolithography; polydimethylsiloxane; retinal prosthesis; thick electrode; Chemical processes; Electrodes; Etching; Fabrication; Gold; Lithography; Prosthetics; Retina; Testing; Wires; Gold electroplating; Micro electrode; Polydimethylsiloxane(PDMS); Retinal prothesis;

fLanguage

English

Publisher

ieee

Conference_Titel

Microtechnologies in Medicine and Biology, 2006 International Conference on

Conference_Location

Okinawa

Print_ISBN

1-4244-0338-3

Electronic_ISBN

1-4244-0338-3

Type

conf

DOI

10.1109/MMB.2006.251524

Filename

4281342