Title :
Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches
Author :
Goldsmith, C. ; Sumant, A. ; Auciello, O. ; Carlisle, J. ; Zeng, H. ; Hwang, J. C M ; Palego, C. ; Wang, W. ; Carpick, R. ; Adiga, V.P. ; Datta, A. ; Gudeman, C. ; O´Brien, S. ; Sampath, S.
Author_Institution :
MEMtronics Corp., Plano, TX, USA
Abstract :
Modifications to a standard capacitive MEMS switch process have been made to allow the incorporation of ultra-nano-crystalline diamond as the switch dielectric. The impact on electromechanical performance is minimal. However, these devices exhibit uniquely different charging characteristics, with charging and discharging time constants 5-6 orders of magnitude quicker than conventional materials. This operation opens the possibility of devices which have no adverse effects of dielectric charging and can be operated near-continuously in the actuated state without significant degradation in reliability.
Keywords :
diamond; microswitches; microwave switches; RF MEMS capacitive switches; electromechanical performance; standard capacitive MEMS switch; switch dielectric; ultra-nano-crystalline diamond; Radiofrequency microelectromechanical systems; MEMS switch; RF MEMS; dielectric charging; reliability; ultra-nano-crystalline diamond;
Conference_Titel :
Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4244-6056-4
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2010.5517781
