Title :
MACH: A High - Hitting Pattern Checker for VLSI Mask Data
Author :
Tsukizoe, A. ; Sakemi, J. ; Kozawa, T. ; Fukuda, H.
Author_Institution :
Central Research Laboratory, Hitachi Ltd., Tokyo, JAPAN
Abstract :
A fast checking algorithm and evaluation of a high-hitting pattern checker (MACH) for VLSI mask data are presented. A two-dimensional-limited searching algorithm has realized O(Nv), where Nv is the number of vectors. The processing speed of MACH is 6,000 vectors per second. MACH can handle VLSI data of more than 10,000,000 vectors that include diagonal vectors. The designer can describe arbitrary design rules using a Design Rule Description Language. We have defined two quality measures for a pattern checker, that is, Detecting Rate and Hitting Rate. MACH has achieved the best detecting rate of 100% and a high hitting rate of more than 80%.
Keywords :
Algorithm design and analysis; Assembly systems; Data handling; Design automation; Integrated circuit measurements; Laboratories; Libraries; Operating systems; Process design; Very large scale integration;
Conference_Titel :
Design Automation, 1983. 20th Conference on
Print_ISBN :
0-8186-0026-8
DOI :
10.1109/DAC.1983.1585737
