DocumentCode
3149675
Title
Research of Multi-Wire Saw Cutting slurry control system
Author
He Jingliang ; Dong Heyuan ; Ye Xiaoyan
Author_Institution
Beijing Inf. Sci. & Technol. Univ., Beijing, China
fYear
2010
fDate
23-25 Nov. 2010
Firstpage
403
Lastpage
406
Abstract
This research which is based on the analysis of Multi-Wire Saw Cutting principle relates to slurry flow and temperature control in Multi-Wire Saw Cutting technology. Several relevant experiments were carried out to verify the feasibility of slurry flow control system´s application in silicon cutting. According to the conclusion of the research, it is a reliable solution and could significantly improve the cutting quality and accuracy, and also reduce the fluctuation rate. This solution produces high pieces rate and could be applied in real product lines.
Keywords
cutting; cutting tools; flow control; sawing machines; slurries; temperature control; cutting quality; fluctuation rate; multiwire saw cutting; silicon cutting; slurry flow control system; temperature control; PID control; Slurry flow; Wafer; multi-wire saw;
fLanguage
English
Publisher
iet
Conference_Titel
Advanced Technology of Design and Manufacture (ATDM 2010), International Conference on
Conference_Location
Beijing
Type
conf
DOI
10.1049/cp.2010.1332
Filename
6139052
Link To Document