Research of Multi-Wire Saw Cutting slurry control system

This research which is based on the analysis of Multi-Wire Saw Cutting principle relates to slurry flow and temperature control in Multi-Wire Saw Cutting technology. Several relevant experiments were carried out to verify the feasibility of slurry flow control system´s application in silicon cutting. According to the conclusion of the research, it is a reliable solution and could significantly improve the cutting quality and accuracy, and also reduce the fluctuation rate. This solution produces high pieces rate and could be applied in real product lines.