Title :
A study on perturbation mode of microwave heating substrate temperature-field
Author :
Chunshan, Yang ; Wenbin, Fu ; Bihua, Wou
Author_Institution :
EMP Lab., Nanjing Eng. Inst., China
Abstract :
The paper presents a new technique, i.e. by microwave design of microwave heating substrate (MHS), presents a microwave axial symmetry temperature field model and finds the general solution by using a perturbation method. On this basis, we design a so-called synthesis dielectric heating substrate and obtain the optimized and larger uniform temperature-field areas than the diameter of the substrate holder in a microwave plasma chemical vapor deposition (MPCVD) system.
Keywords :
dielectric heating; microwave heating; optimisation; perturbation techniques; plasma CVD; substrates; temperature distribution; MPCVD; microwave axial symmetry temperature field; microwave design; microwave heating substrate; microwave plasma chemical vapor deposition system; perturbation mode; synthesis dielectric heating substrate; Chemical vapor deposition; Design optimization; Electromagnetic heating; Heat engines; Plasma chemistry; Plasma confinement; Plasma density; Plasma temperature; Pulse width modulation; Thermal conductivity;
Conference_Titel :
Electromagnetic Compatibility, 2002 3rd International Symposium on
Print_ISBN :
0-7803-7277-8
DOI :
10.1109/ELMAGC.2002.1177520
