Modeling and metrology of metallic nanowires with application to microwave interconnects

Author

Kim, Kichul ; Wallis, T. Mitch ; Rice, Paul ; Chiang, Chin-Jen ; Imtiaz, Atif ; Kabos, Pavel ; Filipovic, Dejan S.

Author_Institution

Dept. of Electr., Comput., & Energy Eng., Univ. of Colorado, Boulder, CO, USA

fYear

2010

fDate

23-28 May 2010

Firstpage

1292

Lastpage

1295

Abstract

Broadband characterization of individual metallic nanowires for microwave interconnect applications is discussed. Circuit and method of moments (MoM) modeling are benchmarked using a set of coplanar waveguide (CPW) test devices with Au microwire (MW) interconnect and air gaps in the middle of the CPW. Comparison with measurements reveals significantly larger errors from circuit models though all dimensions are much smaller than wavelength. Similar CPW devices hosting 100 nm and 250 nm diameter Pt nanowires (NWs) are then investigated to determine the ranges of conductivity and contact resistance for each Pt NW. An algorithm that utilizes the transmission line theory and different nanowire lengths to determine the actual conductivity and contact resistance is proposed and validated.

Keywords

air gaps; contact resistance; coplanar waveguides; integrated circuit interconnections; method of moments; microwave integrated circuits; nanowires; transmission line theory; Au microwire interconnect; CPW test devices; MW interconnect; MoM modeling; air gaps; broadband characterization; contact resistance; coplanar waveguide test devices; metallic nanowires; method of moments modeling; metrology; microwave interconnects; nanowire lengths; transmission line theory; Benchmark testing; Circuit testing; Conductivity; Contact resistance; Coplanar waveguides; Integrated circuit interconnections; Metrology; Microwave devices; Moment methods; Nanowires; Interconnects; conductivity; contact impedance; measurement; modeling; nanowires;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International

Conference_Location

Anaheim, CA

ISSN

0149-645X

Print_ISBN

978-1-4244-6056-4

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2010.5518053

Filename

5518053