• DocumentCode
    315362
  • Title

    Role of polyimides and insulators in the design of microelectronic devices

  • Author

    Wahidabanu, R.S.D. ; Selvam, M. A Panneer ; Udayakumar, K.

  • Author_Institution
    Anna Univ., Madras, India
  • Volume
    2
  • fYear
    1997
  • fDate
    25 -30 May 1997
  • Firstpage
    922
  • Abstract
    The ever increasing trend towards higher materials costs in all industrial operations has made it mandatory to find or develop lower-cost, technically acceptable and easily processable materials to replace conventionally used materials. With this objective in mind, an attempt is made to analyze effects of various phenomena and parameters on insulation systems to solve for 2-dimensional electromagnetic and electrostatic problems specifying the appropriate geometry, material properties and excitations for a device or system of devices. The properties required for an insulating layer are satisfied by the capability of polyimides specially in semiconductor applications. The application areas of polyimides and commercially available polyimides are dealt with in this paper. Comparison of field plots towards material selection is also described
  • Keywords
    insulating thin films; integrated circuit technology; permittivity; polymer films; field plots; geometry; microelectronic devices; polyimides; processable materials; semiconductor applications; two-dimensional electrostatics; Costs; Electromagnetic analysis; Electromagnetic devices; Electrostatic analysis; Geometry; Insulation; Material properties; Microelectronics; Polyimides; Semiconductor materials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Properties and Applications of Dielectric Materials, 1997., Proceedings of the 5th International Conference on
  • Conference_Location
    Seoul
  • Print_ISBN
    0-7803-2651-2
  • Type

    conf

  • DOI
    10.1109/ICPADM.1997.616590
  • Filename
    616590