DocumentCode
315362
Title
Role of polyimides and insulators in the design of microelectronic devices
Author
Wahidabanu, R.S.D. ; Selvam, M. A Panneer ; Udayakumar, K.
Author_Institution
Anna Univ., Madras, India
Volume
2
fYear
1997
fDate
25 -30 May 1997
Firstpage
922
Abstract
The ever increasing trend towards higher materials costs in all industrial operations has made it mandatory to find or develop lower-cost, technically acceptable and easily processable materials to replace conventionally used materials. With this objective in mind, an attempt is made to analyze effects of various phenomena and parameters on insulation systems to solve for 2-dimensional electromagnetic and electrostatic problems specifying the appropriate geometry, material properties and excitations for a device or system of devices. The properties required for an insulating layer are satisfied by the capability of polyimides specially in semiconductor applications. The application areas of polyimides and commercially available polyimides are dealt with in this paper. Comparison of field plots towards material selection is also described
Keywords
insulating thin films; integrated circuit technology; permittivity; polymer films; field plots; geometry; microelectronic devices; polyimides; processable materials; semiconductor applications; two-dimensional electrostatics; Costs; Electromagnetic analysis; Electromagnetic devices; Electrostatic analysis; Geometry; Insulation; Material properties; Microelectronics; Polyimides; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Properties and Applications of Dielectric Materials, 1997., Proceedings of the 5th International Conference on
Conference_Location
Seoul
Print_ISBN
0-7803-2651-2
Type
conf
DOI
10.1109/ICPADM.1997.616590
Filename
616590
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