Special Interest Group (SIG): Fast Wafer Level Reliability (fWLR) Monitoring

With the perspective of detecting, minimising or eliminating reliability fails of products due to processing problems after process qualification it becomes evident to establish fWLR Monitoring on product wafers. Clearly a complete testplan which covers all reliability items is necessary. Therefore, the systematic set up of fWLR should be standardised and described in a document for the semiconductor manufacturing and semiconductor vendor community worldwide. This SIG was initiated to start with a brainstorming on this topic and the ultimate goal would be to introduce a JEDEC guideline on fWLR. The brain storming results are summarised.