DocumentCode
315458
Title
Characterization And Preparation Of Piezoelectric Component With Working Conditions By Using RF-Magnetron Sputtering Process
Author
Park, Myung-Sik ; Kim, Dong-Bum ; Cho, Sang-Wee
fYear
1997
fDate
16-18 April 1997
Firstpage
137
Lastpage
141
Keywords
Chemical vapor deposition; Dielectric materials; Employee welfare; Optical materials; SAW filters; Semiconductor films; Semiconductor thin films; Sputtering; Substrates; Surface morphology;
fLanguage
English
Publisher
ieee
Conference_Titel
IEMT/IMC Symposium, 1997., 1st [Joint International Electronic Manufacturing Symposium and the International Microelectronics Conference]
Conference_Location
IEEE
Print_ISBN
0-7803-4235-6
Type
conf
Filename
618993
Link To Document