Title :
A New Approach To Cu-cu Direct Bump Bonding
Author :
Suga, Tadatomo ; Yuuki, Fumio ; Hosoda, Naoe
Keywords :
Argon; Atomic beams; Electrical resistance measurement; Filling; Large scale integration; Packaging; Semiconductor device measurement; Substrates; Temperature; Wafer bonding;
Conference_Titel :
IEMT/IMC Symposium, 1997., 1st [Joint International Electronic Manufacturing Symposium and the International Microelectronics Conference]
Conference_Location :
IEEE
Print_ISBN :
0-7803-4235-6