• DocumentCode
    315472
  • Title

    Surface Improvement Method For Controlling Oxidation Of Low Melting Point Metal -surface Improvement By Ge Implantation Into In Surface

  • Author

    Kawakita, Testuo ; Hatada, Kenzo

  • fYear
    1997
  • fDate
    16-18 April 1997
  • Firstpage
    240
  • Lastpage
    243
  • Keywords
    Electrons; Germanium; Heat treatment; Indium; Oxidation; Semiconductor films; Silicon; Spectroscopy; Surface resistance; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEMT/IMC Symposium, 1997., 1st [Joint International Electronic Manufacturing Symposium and the International Microelectronics Conference]
  • Conference_Location
    IEEE
  • Print_ISBN
    0-7803-4235-6
  • Type

    conf

  • Filename
    619012
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=315472