Title :
Sol-gel barium titanate thin films on nickel alloy electrodes
Author :
Ogawa, T. ; Saitoh, S. ; Sugiyama, O. ; Kondoh, A. ; Mochizuka, T. ; Masuda, H.
Author_Institution :
Shizuoka Inst. of Sci. & Technol., Fukuroi, Japan
Abstract :
A nickel (Ni) alloy has been applied to bottom electrodes of BaTiO 3 thin films and 2-6 mole % La modified BaTiO3 thin films prepared by sol-gel processing. The gel films on a substrate of soda-lime glass with Ni alloy bottom electrodes were crystallized at a temperature of 600°C. The grains with the size of 1-2 μm consisted of subgrains (20 nm) and the grain size was decreased with increasing La substitution. The remanent polarization of the films decreased with the increase of La substitution and with the decrease of the grain size
Keywords :
barium compounds; dielectric hysteresis; dielectric polarisation; electrodes; ferroelectric materials; ferroelectric thin films; grain size; nickel alloys; sol-gel processing; 600 degC; BaTiO3; BaTiO3 thin films; La substitution; Ni alloy electrodes; bottom electrodes; dielectric properties; ferroelectric properties; grain size; remanent polarization; soda-lime glass substrate; sol-gel processing; Barium; Crystallization; Electrodes; Glass; Grain size; Nickel alloys; Polarization; Temperature; Titanium compounds; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
Conference_Location :
University Park, PA
Print_ISBN :
0-7803-1847-1
DOI :
10.1109/ISAF.1994.522386
