3D system-in-package integration of 60 GHz aperture-coupled micromachined microstrip antennas

An integrated aperture-coupled microstrip antenna for 60 GHz is introduced with the patch element on the inside of the micromachined air cavity. The patch is therefore protected from the outside environment. The coupling of patch and cavity resonance leads further to a compact yet wideband antenna solution. This antenna is a good candidate for realizing active integrated antenna modules in high-resistivity Silicon.