DocumentCode
3159650
Title
Study of electrostatic torsion micromirrors for digital and analog light processing
Author
Bochobza-Degani, Ofir ; Nemirovsky, Yael
Author_Institution
Dept. of Electr. Eng., Technion-Israel Inst. of Technol., Haifa, Israel
fYear
2002
fDate
1 Dec. 2002
Firstpage
53
Lastpage
54
Abstract
This paper will systematically compare the measured results of electrostatic torsion micromirrors; with various design parameters, namely: the actuator shape, location of bottom electrode and aspect ratio of the suspending beam. The results of this study are instrumental for the design of torsion micromirrors with new efficient simulation methodology, achieving extended travel range and minimizing the applied voltage required for their operation.
Keywords
electrostatic devices; micromirrors; optical information processing; torsion; analog light processing; digital light processing; electrostatic torsion micromirror; Displacement measurement; Electrodes; Electrostatic actuators; Electrostatic measurements; Instruments; Micromirrors; Optical devices; Semiconductor device modeling; Shape measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical and Electronics Engineers in Israel, 2002. The 22nd Convention of
Print_ISBN
0-7803-7693-5
Type
conf
DOI
10.1109/EEEI.2002.1178316
Filename
1178316
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