Title :
Multi-channel capacitive readout IC for MEMS inertial sensors
Author :
Bahn, Wook ; Ko, Hyoungho ; Han, Cheol-kyu ; Lee, Sangyoon ; Jeong, Deog-Kyoon ; Cho, Dong-il Dan ; Ahn, Taedong ; Yoo, Kwangho
Author_Institution :
Sch. of Electr. Eng. & Comput., Seoul Nat. Univ., Seoul
Abstract :
A multi-channel capacitive readout IC (integrated-circuit) for MEMS (microelectromechanical systems) inertial sensor is presented. A fully differential, chopper-stabilized SC (switched capacitor) 3-channel charge amplifier is designed. A digital demodulator and a decimator are used to prevent problems of conventional analog multipliers. Performance of the fabricated IC is evaluated with MEMS sensing elements.
Keywords :
demodulators; integrated circuits; microsensors; 3-channel charge amplifier; MEMS inertial sensors; decimator; digital demodulator; fully differential chopper-stabilized switched capacitor; multichannel capacitive readout IC; Accelerometers; Capacitive sensors; Capacitors; Demodulation; Gyroscopes; Integrated circuit noise; Microelectromechanical systems; Micromechanical devices; Sampling methods; Stability; MEMS; capacitive sensing; inertial sensor;
Conference_Titel :
SoC Design Conference, 2008. ISOCC '08. International
Conference_Location :
Busan
Print_ISBN :
978-1-4244-2598-3
Electronic_ISBN :
978-1-4244-2599-0
DOI :
10.1109/SOCDC.2008.4815731
