Title :
Breakdown in lead zirconate titanate (PZT) thin film capacitors
Author :
Yoo, In Kyeong ; Desu, Seshu Babu
Author_Institution :
Samsung Adv. Inst. of Technol., Kyungki, South Korea
Abstract :
Lifetime of PZT capacitors was defined and evaluated by measuring critical number of cycles where electrical degradation (increase of leakage current) begins to dominate polarization during fatigue tests. It was observed that external failure (electrode burst) occurs during fatigue before electrical degradation at high voltage and/or temperature. The normal internal failure (electrical degradation and breakdown) is predominant at relatively lower voltage and/or temperature. PZT capacitors with smaller electrode size shows shorter lifetime, and gentler input cycles (triangular wave rather than square wave, for example) reduces external failure, which implies breakdown under AC input voltage is related to thermal process. It was noticed that fatigue mechanism is not directly related to thermal breakdown
Keywords :
dielectric polarisation; electric breakdown; fatigue; ferroelectric capacitors; ferroelectric materials; ferroelectric thin films; lead compounds; leakage currents; piezoceramics; thin film capacitors; AC input voltage; PZT; PZT thin film capacitors; PbZrO3TiO3; electrical degradation; electrode burst; external failure; fatigue tests; gentler input cycles; internal failure; leakage current increase; lifetime; polarization; square wave; thermal breakdown; thermal process; triangular wave; Breakdown voltage; Capacitors; Current measurement; Degradation; Electric breakdown; Electrodes; Fatigue; Temperature; Titanium compounds; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
Conference_Location :
University Park, PA
Print_ISBN :
0-7803-1847-1
DOI :
10.1109/ISAF.1994.522422
