DocumentCode
316050
Title
From simple devices to promising microsystem applications
Author
Lerch, Ph. ; Dubochet, O. ; Renaud, Ph
Author_Institution
Microsyst. Inst., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
Volume
1
fYear
1997
fDate
14-17 Sep 1997
Firstpage
59
Abstract
We discuss both limitations and potentialities of micromechanical devices based on simple microtechnologies. We briefly review flow sensors and their applications. Underlying technologies and prospective applications are discussed
Keywords
flow measurement; flowmeters; membranes; microsensors; dielectric membranes; micromachined flow sensors; micromechanical devices; microsystem applications; microtechnologies; Biomedical measurements; Biomembranes; Biosensors; Etching; Fluid flow measurement; Heat transfer; Plasma temperature; Silicon; Temperature sensors; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 1997. Proceedings., 1997 21st International Conference on
Conference_Location
Nis
Print_ISBN
0-7803-3664-X
Type
conf
DOI
10.1109/ICMEL.1997.625181
Filename
625181
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