DocumentCode
3161037
Title
A Tutorial on the Mechanisms, Dynamics, and Control of Atomic Force Microscopes
Author
Abramovitch, Daniel Y. ; Andersson, Sean B. ; Pao, Lucy Y. ; Schitter, Georg
Author_Institution
Agilent Lab., Santa Clara
fYear
2007
fDate
9-13 July 2007
Firstpage
3488
Lastpage
3502
Abstract
The atomic force microscope (AFM) is one of the most versatile tools in nanotechnology. For control engineers this instrument is particularly interesting, since its ability to image the surface of a sample is entirely dependent upon the use of a feedback loop. This paper will present a tutorial on the control of AFMs. We take the reader on a walk around the control loop and discuss each of the individual technology components. The major imaging modes are described from a controls perspective and recent advances geared at increasing the performance of these microscopes are highlighted.
Keywords
atomic force microscopy; microscopes; atomic force microscopes; control loop; feedback loop; imaging modes; Atomic force microscopy; Biomedical optical imaging; Force control; Image resolution; Nanobioscience; Optical imaging; Probes; Scanning electron microscopy; Transmission electron microscopy; Tutorial;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 2007. ACC '07
Conference_Location
New York, NY
ISSN
0743-1619
Print_ISBN
1-4244-0988-8
Electronic_ISBN
0743-1619
Type
conf
DOI
10.1109/ACC.2007.4282300
Filename
4282300
Link To Document