• DocumentCode
    3161653
  • Title

    Experiences In Extraction Of Contact Parameters From Process Evaluation Test-structures

  • Author

    Lieneweg, Udo

  • Author_Institution
    California Institute Of Technology
  • fYear
    1988
  • fDate
    22-23 Feb 1988
  • Firstpage
    15
  • Lastpage
    16
  • Keywords
    Conductivity; Contact resistance; Electrical resistance measurement; Flanges; Gallium arsenide; Laboratories; Propulsion; Radio frequency; Strips; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
  • Type

    conf

  • DOI
    10.1109/ICMTS.1988.672921
  • Filename
    672921
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3161653