Title :
Review of Silicon Photonics Foundry Efforts
Author :
Lim, Andy Eu-Jin ; Junfeng Song ; Qing Fang ; Chao Li ; Xiaoguang Tu ; Ning Duan ; Kok Kiong Chen ; Tern, Roger Poh-Cher ; Tsung-Yang Liow
Author_Institution :
Inst. of Microelectron., A*STAR, Singapore, Singapore
Abstract :
Silicon photonics have progressed to a point where the next step for commercialization depends on the accessibility of manufacturing foundries. The implementation of a fabless foundry model using standardized process technology platforms is crucial for that to occur. Research and development (R&D) foundries are beginning to play bigger roles in transforming silicon photonics into a mature technology for mass production. R&D foundry services such as multi-project wafer (MPW) shuttles, customized process developmental runs and small volume manufacturing are discussed. The development of commercial foundries for low cost, high volume production is also shown to be underway, and key results from an on-going effort to set-up a manufacturing silicon photonics foundry line are presented.
Keywords :
elemental semiconductors; integrated optics; manufacturing processes; research and development; silicon; Si; customized process developmental; fabless foundry model; manufacturing foundries; multiproject wafer shuttles; research and development foundries; silicon photonics; small volume manufacturing; standardized process technology; CMOS integrated circuits; Couplings; Fabrication; Foundries; Photonics; Silicon; Standards; Foundry; manufacturing; multi-project wafer (MPW); photonic integration; silicon photonics;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2013.2293274