Title :
Comb/serpentine/cross-bridge Test Structure For Fabrication Process Evaluation
Author :
Sayah, Hoshyar R. ; Buehler, Martin G.
Author_Institution :
California Institute Of Technology
Keywords :
Electrical resistance measurement; Integrated circuit measurements; Integrated circuit technology; Laboratories; Length measurement; Optical device fabrication; Propulsion; System testing; Vehicles; Wire;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672923
