Modeling and design of RF MEMS structures using computationally efficient numerical techniques

Author

Bushyager, N.A. ; Tentzeris, M.M.

Author_Institution

Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2001

fDate

2001

Firstpage

327

Lastpage

330

Abstract

The modeling of MEMS structures using MRTD is presented. Many complex RF structures have been inadequately studied due to limitations in simulation methods. The space and time adaptive grid, as well as the ability to handle intracell feature variations, makes MRTD an ideal method for modeling these structures. MRTD is shown to be able to handle the complex structures found in modern wireless and microwave communication systems efficiently and accurately. Specifically, micromachined structures such as MEMS are treated

Keywords

micromechanical devices; time-domain analysis; RF MEMS device; adaptive grid; computational efficiency; design model; micromachined structure; microwave communication system; multi-resolution time-domain technique; numerical simulation; wireless communication system; Capacitors; Finite difference methods; Microelectromechanical devices; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Solid modeling; Space technology; Substrates; Time domain analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Components and Technology Conference, 2001. Proceedings., 51st

Conference_Location

Orlando, FL

ISSN

0569-5503

Print_ISBN

0-7803-7038-4

Type

conf

DOI

10.1109/ECTC.2001.927744

Filename

927744