• DocumentCode
    3162913
  • Title

    A Direct Method For Measuring The Gate Oxide Capwi-hnces Of MOSFETS

  • Author

    Allen, Richard A. ; Piña, Cesar A. ; Buehler, Martin G.

  • Author_Institution
    California Institute Of Technology
  • fYear
    1988
  • fDate
    22-23 Feb. 1988
  • Firstpage
    45
  • Lastpage
    48
  • Keywords
    Capacitance; Dielectric materials; Dielectrics and electrical insulation; MOS capacitors; MOSFETs; Measurement techniques; Permittivity; Silicon; Testing; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
  • Conference_Location
    Long Beach, CA, USA
  • Type

    conf

  • DOI
    10.1109/ICMTS.1988.672927
  • Filename
    672927
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3162913