Spatial-temporal control of dual-stage nanpositioners

A novel control framework for dual-stage nanopositioners is presented which considers both spatial and temporal constraints. Dual-stage nanopositioners are becoming increasing popular due to their unique ability to achieve long-range and high-speed operation. The proposed control approach addresses the issue that some precision positioning trajectories are not achievable through existing control schemes. Specifically, short-range, low-speed inputs are typically diverted to the long-range actuator, which coincidentally has lower positioning resolution. This approach then limits the dual-stage nanopositioner´s ability to achieve the required positioning resolution that is needed in applications where range and frequency are not inversely correlated (which is a typical, but not always correct assumption for dual stage systems). The proposed spatial-temporal control approach is proposed to overcome the limitations of existing control methods. Simulation results are provided to demonstrate the method´s effectiveness.