A Novel MEMS-Tunable Hairpin Line Filter on Silicon Substrate

Author

Ocera, A. ; Farinelli, P. ; Mezzanotte, P. ; Sorrentino, R. ; Margesin, B. ; Giacomozzi, F.

Author_Institution

Perugia Univ.

fYear

2006

fDate

10-15 Sept. 2006

Firstpage

803

Lastpage

806

Abstract

In this paper a novel MEMS-tunable hairpin line filter is presented. The circuit has been realized on a 525 mum high resistivity silicon substrate using a well established micromachining process at ITC-IRST in Trento, Italy. The tunability of the device is obtained by line sections added to the U-line branches of the resonators of the hairpin filter through 10 identical MEMS ohmic contact cantilever switches. Measurements of the MEMS switch show an isolation and an insertion loss better than 20 dB and 0.3 dB, respectively, in the filter frequency range. Measured S-parameters of the MEMS-filter exhibit an insertion loss and a return loss better than 4.5 dB and 17 dB respectively, with a 15% passband at 6.2 GHz and 10% tuning range

Keywords

S-parameters; micromechanical devices; microwave filters; passive filters; resonators; tuning; 525 micron; 6.2 GHz; ITC-IRST; MEMS ohmic contact cantilever switches; MEMS-tunable hairpin line filter; RF-MEMS; S-parameters; Si; Trento Italy; U-line branches; hairpin filter resonators; high resistivity silicon substrate; micromachining process; Circuits; Conductivity; Insertion loss; Loss measurement; Micromachining; Micromechanical devices; Ohmic contacts; Resonator filters; Silicon; Switches; RF-MEMS; tunable filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2006. 36th European

Conference_Location

Manchester

Print_ISBN

2-9600551-6-0

Type

conf

DOI

10.1109/EUMC.2006.281041

Filename

4057940