DocumentCode
3163230
Title
Broadband Microprobe Characterization of the Ferroelectric Films and Varactors
Author
Vorobiev, A. ; Kuylenstierna, D. ; Rundqvist, P. ; Gevorgian, S.
Author_Institution
Dept. of Microtechnology & Nanoscience, Chalmers Univ. of Technol., Gothenburg
fYear
2006
fDate
10-15 Sept. 2006
Firstpage
843
Lastpage
846
Abstract
A simple method for the assessment of layout parasitics in the on-wafer microprobe characterization of the ferroelectric films and varactors is presented. The proposed method considers also the effect of the negative inductance associated with calibration procedure
Keywords
equivalent circuits; ferroelectric capacitors; ferroelectric thin films; microwave devices; varactors; broadband microprobe characterization; calibration procedure; ferroelectric films; layout parasitics assessment; negative inductance effect; on-wafer microprobe characterization; varactors; Calibration; Circuit testing; Ferroelectric films; Ferroelectric materials; Frequency; Inductance; Microwave circuits; Microwave devices; Parasitic capacitance; Varactors; Varactors; ferroelectric; microwave devices; thin films;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2006. 36th European
Conference_Location
Manchester
Print_ISBN
2-9600551-6-0
Type
conf
DOI
10.1109/EUMC.2006.281051
Filename
4057950
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