Title :
Selection of base substrate material for design against interfacial delamination for a multilayered system-on-package (SOP) structure
Author :
Xie, Weidong ; Hu, Hurang ; Sitaraman, Suresh K.
Author_Institution :
George W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
System-On-Package (SOP) can reduce package size, increase functionality and improve performance at lower costs by embedding passives in a multilayered high-density wiring (HDW) structure. Due to the stringent warpage requirement for processing such a package, new base substrate materials are being explored with high modulus. The substrate will also have a CTE that is close to that of the die. The matched CTE will facilitate no-underfill attach flip-chips on SOP substrates. One major concern with the high-modulus “matched” CTE substrate is the potential interfacial delamination between different dielectric and metallization layers built-up on top of the base substrate. This research examines the possibilities of interfacial delamination in such a multilayered packaging structure under thermal loading. The objective of this paper is to evaluate the possibility of interfacial delamination of the new SOP integrated substrates with a primary focus on metallization copper and dielectric layer interface. An analytical model and numerical model have been developed to calculate the energy release rate of multilayered structures under thermal load. Based on the analysis results, a base layer material has been selected from a group of candidate materials. With this material as the base layer, the substrate has the minimum chance for a delamination to grow. The interfacial fracture toughness of copper/ViaLuxTM 81 PDDF has been measured. The energy release rate obtained from the analysis was compared with the interfacial fracture toughness, and the results indicate that there is minimal delamination growth under the given thermal load conditions. Based on analysis results, design recommendations for improving thermomechanical reliability are proposed
Keywords :
delamination; flip-chip devices; fracture toughness; integrated circuit metallisation; integrated circuit packaging; integrated circuit reliability; laminates; multichip modules; substrates; thermal expansion; thermal management (packaging); thermal stresses; Cu; base substrate material selection; copper/ViaLux 81 PDDF; design against interfacial delamination; design recommendations; embedding passives; energy release rate; high modulus materials; interfacial fracture toughness; matched CTE; metallization-dielectric layers interface; minimal delamination growth; multilayered high-density wiring; multilayered system-on-package; no-underfill attach flip-chips; package size reduction; sequential buildup; thermal gradients; thermal loading; thermomechanical reliability; thin film microvia; warpage requirement; Analytical models; Copper; Cost function; Delamination; Dielectric materials; Dielectric substrates; Metallization; Packaging; Thermal loading; Wiring;
Conference_Titel :
Electronic Components and Technology Conference, 2001. Proceedings., 51st
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-7038-4
DOI :
10.1109/ECTC.2001.927792