• DocumentCode
    3163498
  • Title

    Standard Defect Monitor

  • Author

    Weber, Charles

  • Author_Institution
    Hewlett Packard Corporation
  • fYear
    1988
  • fDate
    22-23 Feb. 1988
  • Firstpage
    114
  • Lastpage
    119
  • Keywords
    Automatic testing; CMOS process; Circuit testing; Condition monitoring; Density measurement; Feedback loop; Laboratories; Manufacturing processes; Semiconductor device manufacture; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
  • Conference_Location
    Long Beach, CA, USA
  • Type

    conf

  • DOI
    10.1109/ICMTS.1988.672945
  • Filename
    672945
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3163498