Research of three-axis vibration sensor and calibration method based on MEMS

Author

Gui, Tang ; Tao, Guo ; Qingzhi, Zhang ; Jie, Zhu

Author_Institution

Key Lab. of Instrum. Sci. & Dynamic Meas., North Univ. of China, Taiyuan, China

fYear

2011

fDate

16-18 April 2011

Firstpage

1572

Lastpage

1575

Abstract

Aerocraft flight test for multiple directions of vibration signals, we designed a three-axis MEMS-based vibration sensor. Paper-based three-axis MEMS vibration sensor starting the design process, detailed design of the whole process of the sensor. Highlighted in the design process should pay attention to the issues and practical applications for the sensor issues arising in the corresponding calibration methods to ensure the reliability of the sensor, and in practical applications with satisfactory results.

Keywords

aerospace instrumentation; calibration; micromechanical devices; vibration measurement; aerocraft flight test; calibration method; design process; paper-based three-axis MEMS vibration sensor; three-axis MEMS-based vibration sensor; three-axis vibration sensor; vibration signals; Calibration; Filtering theory; Low pass filters; Micromechanical devices; Sensitivity; Temperature sensors; Vibrations; MEMS; calibration; reliability; three-axis vibration sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Consumer Electronics, Communications and Networks (CECNet), 2011 International Conference on

Conference_Location

XianNing

Print_ISBN

978-1-61284-458-9

Type

conf

DOI

10.1109/CECNET.2011.5769042

Filename

5769042