• DocumentCode
    3163900
  • Title

    Solid phase graphitization of amorphous carbon pillars grown by FIB-CVD

  • Author

    Fujita, J. ; Ishida, M. ; Ichihashi, T. ; Ochiai, Y. ; Kaito, T. ; Matsui, S.

  • Author_Institution
    NEC Fundamental Res. Labs., Tsukuba, Japan
  • fYear
    2002
  • fDate
    6-8 Nov. 2002
  • Firstpage
    40
  • Lastpage
    41
  • Abstract
    We will report the solid phase graphitization of amorphous carbon nanostructures grown by chemical vapor deposition with focused ion beam (FIB-CVD). We previously demonstrated with several three-dimensional nanostructures, i.e., wine glasses, coils, and pillars. We found the solid phase graphitization was induced by iron catalyst, remaining the original 3D shapes.
  • Keywords
    amorphous state; carbon; chemical vapour deposition; focused ion beam technology; graphitisation; nanostructured materials; C; FIB-CVD growth; amorphous carbon pillar; iron catalyst; solid phase graphitization; three-dimensional nanostructure; Amorphous materials; Annealing; Grain boundaries; Instruments; Iron; Nanostructures; National electric code; Shape; Solids; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
  • Conference_Location
    Tokyo, Japan
  • Print_ISBN
    4-89114-031-3
  • Type

    conf

  • DOI
    10.1109/IMNC.2002.1178533
  • Filename
    1178533
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3163900