Title :
Solid phase graphitization of amorphous carbon pillars grown by FIB-CVD
Author :
Fujita, J. ; Ishida, M. ; Ichihashi, T. ; Ochiai, Y. ; Kaito, T. ; Matsui, S.
Author_Institution :
NEC Fundamental Res. Labs., Tsukuba, Japan
Abstract :
We will report the solid phase graphitization of amorphous carbon nanostructures grown by chemical vapor deposition with focused ion beam (FIB-CVD). We previously demonstrated with several three-dimensional nanostructures, i.e., wine glasses, coils, and pillars. We found the solid phase graphitization was induced by iron catalyst, remaining the original 3D shapes.
Keywords :
amorphous state; carbon; chemical vapour deposition; focused ion beam technology; graphitisation; nanostructured materials; C; FIB-CVD growth; amorphous carbon pillar; iron catalyst; solid phase graphitization; three-dimensional nanostructure; Amorphous materials; Annealing; Grain boundaries; Instruments; Iron; Nanostructures; National electric code; Shape; Solids; Temperature;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178533
