DocumentCode
3164283
Title
CMOS Compatible Switched MEMS Capacitors Up to 220 GHz Applications
Author
Vaha-Heikkila, Tauno ; Ylonen, Mari
Author_Institution
MilliLab, VTT Tech. Res. Centre of Finland
fYear
2006
fDate
10-15 Sept. 2006
Firstpage
1060
Lastpage
1063
Abstract
Very wideband switched MEMS capacitors have been designed and fabricated using CMOS compatible surface micromachining process. On-wafer measurement results are presented at G-band (140-220 GHz) up to 220 GHz showing that MEMS components can be modeled accurately with lumped elements and transmission line models
Keywords
CMOS integrated circuits; capacitors; micromachining; micromechanical devices; millimetre wave circuits; transmission line theory; 140 to 220 GHz; CMOS compatible surface micromachining process; MEMS components; lumped elements; on-wafer measurement; transmission line models; very wideband switched MEMS capacitors; CMOS process; CMOS technology; Capacitors; Distributed parameter circuits; Fabrication; Frequency; Micromechanical devices; Millimeter wave circuits; Millimeter wave technology; Wideband;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2006. 36th European
Conference_Location
Manchester
Print_ISBN
2-9600551-6-0
Type
conf
DOI
10.1109/EUMC.2006.281116
Filename
4058006
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