Title :
MEMS-based MCM VCO for space applications
Author :
Paillard, M. ; Puyatier, G. ; Rijks, Th G S M ; Jourdain, A. ; Steeneken, P.G. ; van Beek, J.T.M. ; De Coster, J. ; Drevon, C. ; Tilmans, H.A.C. ; Cazaux, J.L.
Author_Institution :
Alcatel Alenia Space France, Toulouse
Abstract :
This paper presents the implementation and test of prototype RF MEMS based voltage controlled oscillators (VCO) for space applications. RF MEMS tunable capacitors based on a dual gap architecture have been manufactured with a thin film technology on silicon and have demonstrated high tuning ratio (Cmax/Cmin ~ 4) and high Q factors (up to 100) with a good reproducibility. These tunable capacitors have been integrated as frequency tuning element in the LC tank of multi chip modules (MCM) VCO operating around 1.6 GHz with a tuning range greater than 16% and a phase noise as low as -125 dBc/Hz at 1 MHz offset from the carrier
Keywords :
Q-factor; micromechanical devices; multichip modules; silicon; voltage-controlled oscillators; MEMS-based MCM VCO; RF MEMS tunable capacitors; frequency tuning element; high Q factors; multichip modules; silicon; space applications; thin film technology; voltage controlled oscillators; Capacitors; Manufacturing; Prototypes; Radiofrequency microelectromechanical systems; Semiconductor thin films; Silicon; Space technology; Testing; Tuning; Voltage-controlled oscillators;
Conference_Titel :
Microwave Conference, 2006. 36th European
Conference_Location :
Manchester
Print_ISBN :
2-9600551-6-0
DOI :
10.1109/EUMC.2006.281118
