DocumentCode

316450

Title

Self-aligned Si Field Emitter Arrays with Precise Control in Tip Sharpness and Gate-Tip Spacing

Author

Rakhshandehroo, M.R. ; Pang, S.W.

Author_Institution

The University of Michigan

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

43

Lastpage

47

Keywords

Dry etching; Fabrication; Field emitter arrays; Insulation; Plasma applications; Plasma density; Plasma devices; Plasma sources; Plasma temperature; Polyimides;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627385

Filename

627385