DocumentCode
316455
Title
Effects of thermal annealing on emission characteristics and emitter surface properties of a Spindt-type field emission cathode
Author
Ito, Fuminori ; Konuma, Kazuo ; Okamoto, Akihiko ; Yano, Akihiro
Author_Institution
Microelectronics Research Laboratories, NEC Corporation
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
68
Lastpage
72
Keywords
Annealing; Anodes; Cathodes; Indium tin oxide; Laboratories; Microelectronics; National electric code; Spectroscopy; Surface treatment; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627390
Filename
627390
Link To Document