• DocumentCode
    316458
  • Title

    Fabrication and emission characteristics of GaAs tip and wedge-shaped Field Emitter Arrays by wet etching

  • Author

    Ducrocmet, F. ; Kropfeld, P. ; Yaradou, O. ; Vanoverschelde, A.

  • Author_Institution
    University of Line, France
  • fYear
    1997
  • fDate
    17-21 Aug. 1997
  • Firstpage
    83
  • Lastpage
    86
  • Keywords
    Current density; Electron sources; Fabrication; Field emitter arrays; Gallium arsenide; Rough surfaces; Scanning electron microscopy; Substrates; Surface roughness; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-3786-7
  • Type

    conf

  • DOI
    10.1109/IVMC.1997.627393
  • Filename
    627393
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=316458