DocumentCode
316462
Title
Electron Emission From Disordered Tetrahedral Carbon
Author
Weiss, B.L. ; Badzian, A. ; Pilione, L. ; Badzian, T. ; Drawl, W.
Author_Institution
Materials Research Laboratory, The Pennsylvania State University
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
103
Lastpage
106
Keywords
Carbon dioxide; Chemical vapor deposition; Current density; Electron emission; Optical films; Plasma chemistry; Raman scattering; Spectroscopy; Testing; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627397
Filename
627397
Link To Document