Stiffness computation of a decoupled micro gyroscope and the effect of machining error

This paper introduces a structure of decoupled micro gyroscope. And derives the analytical stiffness calculation of the drive mode and the detect mode. After the manufacture, it uses the microscope and the micro image dimension measurement software to measure the micro gyroscope. By using the measured data and the equivalent elastic modulus, the natural frequency of the drive mode and the detect mode are calculated. By the video and the image processing method, it dynamically tests the drive mode of the micro gyroscope and gets the resonant frequency of the drive mode. The result proofs that the machining error has great effect on the natural frequency of the drive mode of micro gyroscope. And two ways of calculating and testing the natural frequency of the drive mode of the micro gyroscope are effective methods. On the other hand, using the video and the image processing method will provide a novel method for MEMS test.